Add Wish List Add to Cart The item has been added Physical and Technical Problems of SOI Structures and Devices Preface. Contributors. SOI materials: Low dose SIMOX for ULSI applications; A.J. Auberton-Hervé, et al. Why porous silicon for SOI? V.P. Bondarenko, A.M. Dorofeev. Defect engineering in SOI films... RRP: $181.00 Add to Cart The item has been added