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Metal Impurities in Silicon- and Germanium-Based Technologies
Origin, Characterization, Control, and Device Impact
Cor Claeys
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Metal Impurities in Silicon- and Germanium-Based Technologies
Hardback
22 August 2018
$281.00
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Metal Impurities in Silicon- and Germanium-Based Technologies
$281.00
Description
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
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Silicon Germanium
"An excellent introduction to the SiGe BiCMOS technology, from the underlying device physics to current applications."
-Ron Wilson, EETimes"SiGe technology has demonstrated the ability to provide...
$404.00
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