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Machine Learning-Based Modelling in Atomic Layer Deposition Processes
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Machine Learning-Based Modelling in Atomic Layer Deposition Processes
Hardback
15 December 2023
$486.64
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Machine Learning-Based Modelling in Atomic Layer Deposition Processes
$486.64
Description
This book describes the application of machine learning modelling approaches in atomic layer deposition and presents detailed information on modelling, optimization, and prediction of the behaviour and characteristics of ALD for improved process quality control.