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Ion Spectroscopies for Surface Analysis

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30 September 1991
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1. Overview of Ion Spectroscopies for Surface Compositional Analysis.- Glossary of Acronyms.- 1. Purposes.- 2. Introduction.- 2.1. Role of Surface Analysis in Surface Characterization.- 2.1.1. Surface Area.- 2.1.2. Real and Clean Surfaces; Solid Forms.- 2.1.3. Structure and Topography.- 2.1.4. Surface Thermodynamics, Equilibrium Shape, and Diffusion.- 2.1.5. Amount Adsorbed and Nature of Adsorbate/Solid Interactions.- 2.1.6. Surface Composition or Purity.- 2.2. Surface Atom Density and Ultrahigh Vacuum.- 2.3. Compositional Depth Profiling.- 2.3.1. Sputtering Mechanism, Yield, and Rate.- 2.3.2. Instrumentation.- 2.3.3. Data Obtained and Typical Results.- 3. Overview of Compositional Surface Analysis by Ion Spectroscopies.- 3.1. Effects of Energetic Ion Impact on Surfaces.- 3.2. Stimulation and Detection in Ion Spectroscopies.- 4. Ion Spectroscopies Using Ion Stimulation.- 4.1. Ion Detection: SIMS, ISS, RBS, NRA, HFS.- 4.1.1. Secondary Ion Mass Spectrometry (SIMS).- 4.1.2. Ion Scattering Spectrometry (ISS).- 4.1.3. Rutherford Backscattering Spectrometry (RBS), Nuclear Reaction Analysis (NRA), and Hydrogen Forward Scattering Spectrometry (HFS).- 4.1.4. Comparisions of SIMS, SNMS, ISS, RBS, AES, and XPS.- 4.2. Photon Detection of Ion-Induced Radiation.- 4.2.1. Particle-Induced X-Ray Emission (PIXE).- 4.2.2. Bombardment-Induced Light Emission (BLE).- 4.3. Electron Detection; Ion Neutralization Spectroscopy (INS).- 4.4. Neutral (Postionized) Detection: SNMS, SALI, SARISA.- 5. Ion Spectroscopies Using Ion Detection.- 5.1. Electron Stimulation: ESD, ESDIAD, EPMA.- 5.1.1. Electron Stimulated Desorption (ESD).- 5.1.2. Electron Stimulated Desorption Ion Angular Distribution (ESDIAD).- 5.2. Photon Stimulation: LAMMA, LIMS.- 5.3. Neutral Stimulation: FAB-SIMS, NSS.- 5.4. Electric Field Stimulation: APFIM, FIMS.- References.- 2. Surface Structure and Reaction Studies by Ion-Solid Collisions.- 1. Introduction.- 2. The Experimental Approach.- 3. How to View the Process.- 3.1. Transport Theories.- 3.2. Molecular Dynamics Calculations.- 3.2.1. Yields.- 3.2.2. Energy and Angular Distributions.- 3.2.3. Clusters.- 3.2.4. Damage to the Substrate.- 3.3. Interaction Potentials.- 3.3.1. Repulsive Pair Potentials and the BCA.- 3.3.2. Attractive Pair Potentials.- 3.3.3. Many-Body Potentials-Metals and the Embedded Atom Method.- 3.3.4. Many-Body Potentials-Silicon and Covalent Solids.- 3.3.5. Many-Body Potentials-Reactions on Surfaces.- 3.3.6. Many-Body Potential-Molecular Solids.- 3.3.7. The Future.- 4. Electronic Effects.- 4.1. Tunneling Model.- 4.2. Bond-Breaking Model.- 4.3. Deexcitation Model for Sputtered Excited Neutral Atoms.- 5. Surface Characterization with Ion Bombardment.- 5.1. Surface Structure Studies.- 5.1.1. Trajectories of Substrate Species.- 5.1.2. Trajectories of Overlayer Species.- 5.1.3. Shadow-Cone Enhanced Desorption.- 5.2. Molecular Composition Studies.- 5.2.1. Intact Molecular Ejection.- 5.2.2. Molecular Recombination During Ejection.- 5.2.3. Prospects for Detection of Desorbed Neutral Molecules.- 6. Conclusions and Prospects.- References.- 3. Particle-Induced Desorption Ionization Techniques for Organic Mass Spectrometry.- 1. Introduction.- 1.1. Ionization Overview.- 1.1.1. Desorption Ionization.- 1.1.2. Nebulization Ionization.- 1.2. Historial Perspective.- 1.3. Instrumentation.- 1.3.1. Source Design.- 1.3.2. Mass Analyzers.- 1.3.3. Detection of Ions.- 2. Spectral Effects of Primary Beam Parameters.- 2.1. Observe or Reverse Irradiation.- 2.2. Angle of Incidence of Primary Beam.- 2.3. Charge State Dependence.- 2.4. Energy Dependence.- 2.4.1. Wavelength Dependence in Laser Desorption.- 2.4.2. Particle Mass and Velocity Dependences.- 2.5. Primary Particle Flux and Dose.- 3. Properties of Secondary Ions.- 3.1. Energy Distribution.- 3.2. Angular Distribution.- 3.3. Time Distribution.- 3.4. Charge Distribution.- 4. Sample Preparation.- 4.1. Neat Samples.- 4.2. Matrices for Sample Preparation.- 4.2.1. Solid Sample Matrices.- 4.2.2....

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$150.61
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Ion Spectroscopies for Surface Analysis

$150.61

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1. Overview of Ion Spectroscopies for Surface Compositional Analysis.- Glossary of Acronyms.- 1. Purposes.- 2. Introduction.- 2.1. Role of Surface Analysis in Surface Characterization.- 2.1.1. Surface Area.- 2.1.2. Real and Clean Surfaces; Solid Forms.- 2.1.3. Structure and Topography.- 2.1.4. Surface Thermodynamics, Equilibrium Shape, and Diffusion.- 2.1.5. Amount Adsorbed and Nature of Adsorbate/Solid Interactions.- 2.1.6. Surface Composition or Purity.- 2.2. Surface Atom Density and Ultrahigh Vacuum.- 2.3. Compositional Depth Profiling.- 2.3.1. Sputtering Mechanism, Yield, and Rate.- 2.3.2. Instrumentation.- 2.3.3. Data Obtained and Typical Results.- 3. Overview of Compositional Surface Analysis by Ion Spectroscopies.- 3.1. Effects of Energetic Ion Impact on Surfaces.- 3.2. Stimulation and Detection in Ion Spectroscopies.- 4. Ion Spectroscopies Using Ion Stimulation.- 4.1. Ion Detection: SIMS, ISS, RBS, NRA, HFS.- 4.1.1. Secondary Ion Mass Spectrometry (SIMS).- 4.1.2. Ion Scattering Spectrometry (ISS).- 4.1.3. Rutherford Backscattering Spectrometry (RBS), Nuclear Reaction Analysis (NRA), and Hydrogen Forward Scattering Spectrometry (HFS).- 4.1.4. Comparisions of SIMS, SNMS, ISS, RBS, AES, and XPS.- 4.2. Photon Detection of Ion-Induced Radiation.- 4.2.1. Particle-Induced X-Ray Emission (PIXE).- 4.2.2. Bombardment-Induced Light Emission (BLE).- 4.3. Electron Detection; Ion Neutralization Spectroscopy (INS).- 4.4. Neutral (Postionized) Detection: SNMS, SALI, SARISA.- 5. Ion Spectroscopies Using Ion Detection.- 5.1. Electron Stimulation: ESD, ESDIAD, EPMA.- 5.1.1. Electron Stimulated Desorption (ESD).- 5.1.2. Electron Stimulated Desorption Ion Angular Distribution (ESDIAD).- 5.2. Photon Stimulation: LAMMA, LIMS.- 5.3. Neutral Stimulation: FAB-SIMS, NSS.- 5.4. Electric Field Stimulation: APFIM, FIMS.- References.- 2. Surface Structure and Reaction Studies by Ion-Solid Collisions.- 1. Introduction.- 2. The Experimental Approach.- 3. How to View the Process.- 3.1. Transport Theories.- 3.2. Molecular Dynamics Calculations.- 3.2.1. Yields.- 3.2.2. Energy and Angular Distributions.- 3.2.3. Clusters.- 3.2.4. Damage to the Substrate.- 3.3. Interaction Potentials.- 3.3.1. Repulsive Pair Potentials and the BCA.- 3.3.2. Attractive Pair Potentials.- 3.3.3. Many-Body Potentials-Metals and the Embedded Atom Method.- 3.3.4. Many-Body Potentials-Silicon and Covalent Solids.- 3.3.5. Many-Body Potentials-Reactions on Surfaces.- 3.3.6. Many-Body Potential-Molecular Solids.- 3.3.7. The Future.- 4. Electronic Effects.- 4.1. Tunneling Model.- 4.2. Bond-Breaking Model.- 4.3. Deexcitation Model for Sputtered Excited Neutral Atoms.- 5. Surface Characterization with Ion Bombardment.- 5.1. Surface Structure Studies.- 5.1.1. Trajectories of Substrate Species.- 5.1.2. Trajectories of Overlayer Species.- 5.1.3. Shadow-Cone Enhanced Desorption.- 5.2. Molecular Composition Studies.- 5.2.1. Intact Molecular Ejection.- 5.2.2. Molecular Recombination During Ejection.- 5.2.3. Prospects for Detection of Desorbed Neutral Molecules.- 6. Conclusions and Prospects.- References.- 3. Particle-Induced Desorption Ionization Techniques for Organic Mass Spectrometry.- 1. Introduction.- 1.1. Ionization Overview.- 1.1.1. Desorption Ionization.- 1.1.2. Nebulization Ionization.- 1.2. Historial Perspective.- 1.3. Instrumentation.- 1.3.1. Source Design.- 1.3.2. Mass Analyzers.- 1.3.3. Detection of Ions.- 2. Spectral Effects of Primary Beam Parameters.- 2.1. Observe or Reverse Irradiation.- 2.2. Angle of Incidence of Primary Beam.- 2.3. Charge State Dependence.- 2.4. Energy Dependence.- 2.4.1. Wavelength Dependence in Laser Desorption.- 2.4.2. Particle Mass and Velocity Dependences.- 2.5. Primary Particle Flux and Dose.- 3. Properties of Secondary Ions.- 3.1. Energy Distribution.- 3.2. Angular Distribution.- 3.3. Time Distribution.- 3.4. Charge Distribution.- 4. Sample Preparation.- 4.1. Neat Samples.- 4.2. Matrices for Sample Preparation.- 4.2.1. Solid Sample Matrices.- 4.2.2....

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