This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
Electrons and ions have been used for over 40 years as probes to investigate the fascinating properties of helium liquids. The study of the transport properties of microscopic charge carriers sheds...
Despite the recent progress in developing various microanalytical tools of better spatial resolution and more sensitivity to chemical analyses for the study of various defects in metallic solids the...
This book provides a selection of recent developments in scanning ion conductance microscopy (SICM) technology and applications. In recent years, SICM has been applied in an ever-increasing number of...
The publication date of the first edition is not stated, but the new edition is apparently considerably revised and expanded. It was written to serve as a multi-purpose text at the senior or graduate...
The Office of Scientific & Technical Information (OSTI), is a part of the U.S. Department of Energy (DOE) that houses research and development results from projects funded by the...
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