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Glow Discharge Processes

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Hardback
11-September-1980
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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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    Product Details
    ISBN-13
    9780471078289
    Author
    Brian Chapman
    Publisher
    John Wiley & Sons Inc (US)
    Published
    11-September-1980
    Format
    Hardback

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    $582.68
    Ships in 3-5 business days

    Delivery estimate

    Hurry up! Current stock:

    Glow Discharge Processes

    $582.68

    Description

    Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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